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Ardito, R.; Corigliano, A.; Frangi, A.; Magagnin, L.; Rizzini, F.;

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The goal of this research is to provide an effective tool for the computation of ad-hesion energy in the case of surfaces which are as alike as possible to real-life Micro-Electro-Mechanical Systems (MEMS). The basic data is represented by a refined geometrical model of rough surfaces, whose properties have been measured by means of cutting-edge technolo-gies, such as Atomic Force Microscopy. The measured stochastic parameters have been used in order to obtain artificial rough surfaces. An important issue has been represented by the effective modeling of attractive force. Among the various causes of adhesion, we have consid-ered the van der Waals and capillary forces, which are prevalent in the typical applications of MEMS. The former interaction has been modeled via Lennard-Jones potential and proximity force approximation. Capillary effects have been studied in a more detailed way, in view of the lack (to the Authors’ knowledge) of a definitive numerical techniques. The numerical re-sults are well compared to experimental outcomes, even though some work is still in progress.

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Palavras-chave: Micromechanics, Finite Element Analyses, Adhesion, MEMS, Rough Surfaces,


DOI: 10.5151/meceng-wccm2012-18863

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Como citar:

Ardito, R.; Corigliano, A.; Frangi, A.; Magagnin, L.; Rizzini, F.; "COMPUTATION OF ADHESIVE FORCES DUE TO VAN DER WAALS AND CAPILLARY EFFECTS ON REALISTIC ROUGH SURFACES", p. 2420-2431 . In: In Proceedings of the 10th World Congress on Computational Mechanics [= Blucher Mechanical Engineering Proceedings, v. 1, n. 1]. São Paulo: Blucher, 2014.
ISSN 2358-0828, DOI 10.5151/meceng-wccm2012-18863

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