Outubro 2014 vol. 1 num. 1 - 13th International Symposium on Multiscale, Multifunctional and Functionally Graded Materials
Abstract - Open Access.
Stoichiometric and structural controlling of boron carbide thin films by using boron-carbon dual-targets
ZHANG, Song ; TU, Rong ; LU, Wenzhong ; WANG, Chuanbin ; SHEN, Qiang ; ZHANG, Lianmeng ;
Abstract:
The stoichiometry of boron carbide thin films was controlled in the range of 0.1~8.9 and 3.04 ~ 5.92 via pulsed laser deposition by using SPSed- (Spark Plasma Sintered) and dual-targets, respectively. The amorphous films sized 50 nm in thickness. In the case of dual-target, the reaction rate of boron and carbon atoms increased with the increasing of target rotating speed. Uniform, layered and FGM (Functionally Graded Materials) B-C thin films can be obtained by controlling this reaction rate. Two kinds of structural evolutions have been found by investigation of bonding environments in as-deposited thin films via XPS (X-ray photoelectron spectroscopy) study. With decrease of B/C ratio, films deposited from SPSed-target show the B11C-CBB→B11C-CBC transformation. In contrast, the films deposited from dual-target present the B11C-CBB→B10C2-CBB structural change. Also, the deposition mechanism of films by this novel dual-target has been discussed.
Abstract:
Palavras-chave: boron carbide, stoichiometry, structure, hybridization, dual-targets, PLD (Pulsed laser deposition),
Palavras-chave:
Referências bibliográficas
Como citar:
ZHANG, Song; TU, Rong; LU, Wenzhong; WANG, Chuanbin; SHEN, Qiang; ZHANG, Lianmeng; "Stoichiometric and structural controlling of boron carbide thin films by using boron-carbon dual-targets", p. 61 . In: Proceedings of the 13th International Symposium on Multiscale, Multifunctional and Functionally Graded Materials [=Blucher Material Science Proceedings, v.1, n.1].
São Paulo: Blucher,
2014.
ISSN 2358-9337,
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